| Xingtai Silicon Materials — 6N Silane Product Standard | ||||
|---|---|---|---|---|
| Item | Test Item | Unit | Specification | Analysis Method |
| Composition Requirements | SiH4 | Vol% | ≥99.9999 | — |
| H2 | ppm(v/v) | ＜20.0 | GC | |
| O2 + Ar | ppm(v/v) | ＜0.05 | GC | |
| N2 | ppm(v/v) | ＜0.5 | GC | |
| CH4 | ppm(v/v) | ＜0.05 | GC | |
| C2~C4 | ppm(v/v) | ＜0.1 | GC | |
| CO | ppm(v/v) | ＜0.05 | GC | |
| CO2 | ppm(v/v) | ＜0.05 | GC | |
|
Chlorosilanes (SiH2Cl2, SiHCl3, SiCl4) |
ppm(v/v) | ＜0.1 | GC | |
| Si2H6 | ppm(v/v) | ＜0.3 | GC | |
| H2O | ppm(v/v) | ＜0.5 | Electrolysis | |
| Metal Ion Requirements | Aluminum (Al) | ppb | ＜0.2 | ICPMS |
| Antimony (Sb) | ppb | ＜0.2 | ICPMS | |
| Arsenic (As) | ppb | ＜0.2 | ICPMS | |
| Boron (B) | ppb | ＜0.2 | ICPMS | |
| Gallium (Ga) | ppb | ＜0.2 | ICPMS | |
| Phosphorus (P) | ppb | ＜0.2 | ICPMS | |
| Cr+Cu+Fe+Ni+Zn | ppb | ＜1.0 | ICPMS | |
