Chlorosilane Gas Monochlorosilane（MCS）SiH3Cl Electronic grade chlorosilane

Specifications
Application
packaging

Xingtai Silicon Materials — Monochlorosilane (MCS/SiH ₃Cl) Product Standard
Category	Item	Unit	Spec	Method
Composition Requirements	SiH ₃Cl	Vol%	≥99.9	GC
	DCS	Vol%	≤0.05	GC
	TCS	Vol%	≤0.025	GC
	STC	Vol%	≤0.025	GC
	CO	ppm	≤1.0	GC
	CO ₂	ppm	≤1.0	GC
	N ₂	ppm	≤1.0	GC
	O ₂+Ar	ppm	≤1.0	GC
Metal Ion Analysis	Boron (B)	ppb	≤5.0	ICP-MS
	Phosphorus (P)	ppb	≤5.0	ICP-MS
	Arsenic (As)	ppb	≤5.0	ICP-MS
	Aluminum (Al)	ppb	≤5.0	ICP-MS
	Chromium (Cr)	ppb	≤5.0	ICP-MS
	Iron (Fe)	ppb	≤5.0	ICP-MS
	Nickel (Ni)	ppb	≤5.0	ICP-MS

Main Applications of High-Purity Electronic Gas Monochlorosilane (SiH ₃Cl)

An essential silicon source for semiconductors, display panels, and solar cells

Silicon Epitaxial Growth

Under low-temperature conditions, SiH₃Cl is used to deposit **high-purity silicon epitaxial layers**. It performs exceptionally well in low-temperature epitaxy, helping to **reduce the thermal budget** and its impact on device performance.

Low-Temp Epitaxy CVD Semiconductor

Amorphous Silicon Deposition (a-Si)

Acts as a silicon source for CVD processes to deposit **amorphous silicon thin films**. It is primarily used in the manufacturing of **thin-film solar cells** and **thin-film transistors (TFT)**.

Solar Cells TFT a-Si

Polysilicon Deposition

Used to manufacture **high-purity polycrystalline silicon thin films**, a key material for the semiconductor and display panel industries. Applications include **TFT-LCD** and various **memory devices**.

TFT-LCD Memory Devices Polysilicon

Higher Silane Precursor

Serves as a chemical precursor for the synthesis of **higher silanes** (such as Disilane). Higher silanes are critical intermediates for preparing more complex silicon-based materials.

Disilane Intermediate Precursor

Trichlorosilane Packaging Specifications

Xingtai Silicon Material — Trichlorosilane (SiHCl₃) Packaging & Specifications

We provide a variety of Trichlorosilane packaging specifications to meet your needs in semiconductor manufacturing and polysilicon production.

Primary Packaging Options

L-Cylinder (DOT-40L)

Features: 35kg fill weight. Easy to handle and ideal for laboratory use or small-scale production.

450L-Cylinder (DOT-450L)

Features: 400kg fill weight. Balances transportation efficiency with operational convenience.

Detailed Specifications

Product	Cylinder Name	Cylinder Size	SiHCl₃ Filling Weight	Package Material	Valve Type
Trichlorosilane	L-Cylinder	DOT-40L	35kg	316 Stainless Steel	CGA/DISS636
Trichlorosilane	450L-Cylinder	DOT-450L	400kg	316 Stainless Steel	CGA/DISS636

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Product Name	Monochlorosilane SiH 3Cl
Alias	Chlorosilane, Silyl Chloride
CAS Number	13465-78-6
UN Number	UN 2988 4.3
Risk Term	Flammable
Explosive Limits	1.75% - 48.5%

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Xingtai Silicon Material — Trichlorosilane (SiHCl₃) Packaging & Specifications

Primary Packaging Options

L-Cylinder (DOT-40L)

450L-Cylinder (DOT-450L)

Detailed Specifications