Electronic grade Dichlorosilane(DCS)Dichlorosilicon DCS gas SiH2Cl2 supplier

Product Name Dichlorosilane SiH 2Cl 2
Aliases DCS, Dichlorosilylene
CAS No. 4109-96-0
UN Number UN 2189 2.3
Hazard Terms Extremely Flammable, Reacts with Water, Toxic if Inhaled
Explosion Limits 4.1% - 99%

SAFETY WARNING: Dichlorosilane is an extremely flammable gas. Professional protective measures must be equipped during operation.


Dichlorosilane (DCS) Product Standards
Item Unit Indicator Method
1. Component Requirements
SiH 2Cl 2 Vol% ≥99.99
STC (SiCl 4) ppm (v/v) ≤25 GC
TCS (SiHCl 3) ppm (v/v) ≤10 GC
MCS + HCl ppm (v/v) ≤50 GC
N 2 / O 2+Ar / CO ppm (v/v) ≤1 GC
H 2 ppm (v/v) ≤10 GC
CO 2 ppm (v/v) ≤1 FT-IR
CH 4 ppm (v/v) ≤1 ICP-MS
2. Metal Ion Testing (ppb)
B + Al ppb ≤0.10 ICP-MS
P + As ppb ≤0.30 ICP-MS
Fe ppb ≤5.00 ICP-MS
Ca / Cr / K / Ni ppb ≤1.00 ICP-MS
Na / Mn / Cu ppb ≤0.20 ICP-MS
Ga / Sb / In / Mo / Zn ppb ≤0.10 ICP-MS
Cd / Co ppb ≤0.50 ICP-MS


Contact Information
Tel:+86 183 6480 0823
Email: dingt@xtsim.com
Address:Loude Town Xintai County Taian City Shandong Province
GSMALL2.0