Specifications
Application
packaging

Trichlorosilane (SiHCl ₃) Quality Standards
Category	Test Item	Unit	Indicator	Method
Composition	SiHCl ₃	Vol%	≥99.5	—
	DCS	Vol%	≤0.20	GC
	STC	Vol%	≤0.20	GC
	Polymers	Vol%	≤0.10	GC
Metal Ions	Al	ppb	≤100	ICP
	P	ppb	≤30	ICP
	Fe+Cr+Cu+Zn	ppb	≤300	ICP
	B+Ga+In	ppb	≤100	ICP

Trichlorosilane (SiHCl₃) Applications

Photovoltaic: Core Raw Material

Siemens Process: SiHCl₃ is the key raw material for producing solar-grade polysilicon (purity up to 99.99%-99.9999%).

Cost & Recycling: Approx. 1-1.5 tons of TCS is consumed per ton of polysilicon. By-products are fully recyclable.

Polysilicon Production Material Recycling

Semiconductor: High Deposition Rate

CVD Silicon Source: In Chemical Vapor Deposition, it shows significantly higher growth rates than Silane, improving manufacturing efficiency.

Enhanced Safety: Liquid at room temperature (BP 31.8℃), making storage and transport safer than gaseous sources.

CVD Process High Growth Rate

SiC Epitaxy: Preferred for High Voltage

SiC Epitaxial Layer: Electronic grade TCS directly determines the voltage resistance and switching speed of MOSFET power devices.

High Voltage Advantage: At 1600-1650℃, it effectively suppresses silicon droplet formation for high-voltage SiC devices.

SiC Epitaxy Power Devices

FinFET Devices: Ultra-High Purity

Advanced Nodes: Used for etching and filling of FinFET 3D structures in sub-14nm processes.

Impurity Control: Gaseous impurities must be strictly controlled at 0.01 ppb level to prevent oxidation interference.

14nm Node 0.01ppb Level

Important Note on Product Packaging

Dear Customer,

Regarding the packaging methods and specifications of this product, adjustments or customizations are required based on your **actual purchase volume**.

Please ensure you **contact your dedicated sales representative** to discuss and determine the most suitable packaging solution to ensure the best logistics and usage experience.

Thank you for your trust and cooperation with Xingtai Silicon!

Trichlorosilane TCS Silicochloroform Industrial Grade Trichlorosilane Trichlorosilane manufacturers Trichlorosilane 99% / 99.9%

Trichlorosilane (SiHCl₃) Applications

Important Note on Product Packaging

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